EE6007 MICRO ELECTRO MECHANICAL SYSTEMS L T P C 3 0 0 3
OBJECTIVES
• To provide knowledge of semiconductors and solid mechanics to fabricate MEMS devices.
• To educate on the rudiments of Micro fabrication techniques.
• To introduce various sensors and actuators
• To introduce different materials used for MEMS
• To educate on the applications of MEMS to disciplines beyond Electrical and Mechanical engineering.
UNIT I INTRODUCTION 9
Intrinsic Characteristics of MEMS – Energy Domains and Transducers- Sensors and Actuators – Introduction to Micro fabrication - Silicon based MEMS processes – New Materials – Review of Electrical and Mechanical concepts in MEMS – Semiconductor devices – Stress and strain analysis – Flexural beam bending- Torsional deflection.
UNIT II SENSORS AND ACTUATORS-I 9
Electrostatic sensors – Parallel plate capacitors – Applications – Interdigitated Finger capacitor – Comb drive devices – Micro Grippers – Micro Motors - Thermal Sensing and Actuation – Thermal expansion – Thermal couples – Thermal resistors – Thermal Bimorph - Applications – Magnetic Actuators – Micromagnetic components – Case studies of MEMS in magnetic actuators- Actuation using Shape Memory Alloys
UNIT III SENSORS AND ACTUATORS-II 9
Piezoresistive sensors – Piezoresistive sensor materials - Stress analysis of mechanical elements – Applications to Inertia, Pressure, Tactile and Flow sensors – Piezoelectric sensors and actuators – piezoelectric effects – piezoelectric materials – Applications to Inertia , Acoustic, Tactile and Flow sensors.
UNIT IV MICROMACHINING 9
Silicon Anisotropic Etching – Anisotrophic Wet Etching – Dry Etching of Silicon – Plasma Etching – Deep Reaction Ion Etching (DRIE) – Isotropic Wet Etching – Gas Phase Etchants – Case studies - Basic surface micro machining processes – Structural and Sacrificial Materials – Acceleration of sacrificial Etch – Striction and Antistriction methods – LIGA Process - Assembly of 3D MEMS – Foundry process.
UNIT V POLYMER AND OPTICAL MEMS 9
Polymers in MEMS– Polimide - SU-8 - Liquid Crystal Polymer (LCP) – PDMS – PMMA – Parylene – Fluorocarbon - Application to Acceleration, Pressure, Flow and Tactile sensors- Optical MEMS – Lenses and Mirrors – Actuators for Active Optical MEMS.
OUTCOMES
TOTAL : 45 PERIODS
• Ability to understand and apply basic science, circuit theory, Electro-magnetic field theory control theory and apply them to electrical engineering problems.
• Ability to understand and analyse, linear and digital electronic circuits.
TEXT BOOKS:
1. Chang Liu, "Foundations of MEMS", Pearson Education Inc., 2006.
2. Stephen D Senturia, "Microsystem Design", Springer Publication, 2000.
3. Tai Ran Hsu, “MEMS & Micro systems Design and Manufacture” Tata McGraw Hill, New
Delhi, 2002.
REFERENCES:
1. Nadim Maluf,“ An Introduction to Micro Electro Mechanical System Design”, Artech House,
2000.
2. Mohamed Gad-el-Hak, editor, “ The MEMS Handbook”, CRC press Baco Raton, 2000
3. Julian w. Gardner, Vijay K. Varadan, Osama O. Awadelkarim, "Micro Sensors MEMS and
Smart Devices", John Wiley & Son LTD,2002
4. James J.Allen, "Micro Electro Mechanical System Design", CRC Press Publisher, 2010
5. Thomas M.Adams and Richard A.Layton, “Introduction MEMS, Fabrication and Application,” Springer 2012.
OBJECTIVES
• To provide knowledge of semiconductors and solid mechanics to fabricate MEMS devices.
• To educate on the rudiments of Micro fabrication techniques.
• To introduce various sensors and actuators
• To introduce different materials used for MEMS
• To educate on the applications of MEMS to disciplines beyond Electrical and Mechanical engineering.
UNIT I INTRODUCTION 9
Intrinsic Characteristics of MEMS – Energy Domains and Transducers- Sensors and Actuators – Introduction to Micro fabrication - Silicon based MEMS processes – New Materials – Review of Electrical and Mechanical concepts in MEMS – Semiconductor devices – Stress and strain analysis – Flexural beam bending- Torsional deflection.
UNIT II SENSORS AND ACTUATORS-I 9
Electrostatic sensors – Parallel plate capacitors – Applications – Interdigitated Finger capacitor – Comb drive devices – Micro Grippers – Micro Motors - Thermal Sensing and Actuation – Thermal expansion – Thermal couples – Thermal resistors – Thermal Bimorph - Applications – Magnetic Actuators – Micromagnetic components – Case studies of MEMS in magnetic actuators- Actuation using Shape Memory Alloys
UNIT III SENSORS AND ACTUATORS-II 9
Piezoresistive sensors – Piezoresistive sensor materials - Stress analysis of mechanical elements – Applications to Inertia, Pressure, Tactile and Flow sensors – Piezoelectric sensors and actuators – piezoelectric effects – piezoelectric materials – Applications to Inertia , Acoustic, Tactile and Flow sensors.
UNIT IV MICROMACHINING 9
Silicon Anisotropic Etching – Anisotrophic Wet Etching – Dry Etching of Silicon – Plasma Etching – Deep Reaction Ion Etching (DRIE) – Isotropic Wet Etching – Gas Phase Etchants – Case studies - Basic surface micro machining processes – Structural and Sacrificial Materials – Acceleration of sacrificial Etch – Striction and Antistriction methods – LIGA Process - Assembly of 3D MEMS – Foundry process.
UNIT V POLYMER AND OPTICAL MEMS 9
Polymers in MEMS– Polimide - SU-8 - Liquid Crystal Polymer (LCP) – PDMS – PMMA – Parylene – Fluorocarbon - Application to Acceleration, Pressure, Flow and Tactile sensors- Optical MEMS – Lenses and Mirrors – Actuators for Active Optical MEMS.
OUTCOMES
TOTAL : 45 PERIODS
• Ability to understand and apply basic science, circuit theory, Electro-magnetic field theory control theory and apply them to electrical engineering problems.
• Ability to understand and analyse, linear and digital electronic circuits.
TEXT BOOKS:
1. Chang Liu, "Foundations of MEMS", Pearson Education Inc., 2006.
2. Stephen D Senturia, "Microsystem Design", Springer Publication, 2000.
3. Tai Ran Hsu, “MEMS & Micro systems Design and Manufacture” Tata McGraw Hill, New
Delhi, 2002.
REFERENCES:
1. Nadim Maluf,“ An Introduction to Micro Electro Mechanical System Design”, Artech House,
2000.
2. Mohamed Gad-el-Hak, editor, “ The MEMS Handbook”, CRC press Baco Raton, 2000
3. Julian w. Gardner, Vijay K. Varadan, Osama O. Awadelkarim, "Micro Sensors MEMS and
Smart Devices", John Wiley & Son LTD,2002
4. James J.Allen, "Micro Electro Mechanical System Design", CRC Press Publisher, 2010
5. Thomas M.Adams and Richard A.Layton, “Introduction MEMS, Fabrication and Application,” Springer 2012.
